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发明名称
VERTICAL-DIFFUSION CVD APPARATUS
摘要
申请公布号
JPH06151346(A)
申请公布日期
1994.05.31
申请号
JP19920316064
申请日期
1992.10.30
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YANAGAWA HIDEHIRO
分类号
C30B25/08;C30B25/14;H01L21/205;H01L21/22;(IPC1-7):H01L21/22
主分类号
C30B25/08
代理机构
代理人
主权项
地址
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