| 摘要 |
PURPOSE:To prevent adhesion between an upper movable electrode and a lower electrode in opposition thereto in an accelerometer having the upper electrode which deforms on receipt of acceleration and the lower electrode in opposition thereto. CONSTITUTION:The title device is constituted including a spindle part 3 which receives acceleration, a frame-like fixed part 1 enclosing the spindle part 3 with a clearance 2 between, a beam part 4 which puts the fixed part 1 and the spindle part 3 from below, an upper electrode 5 which is formed of an elastic conductive material, connects the fixed part 1 and the spindle part 3 and is provided with a rising part at a center, lower electrodes 27, 28 formed in a region in opposition to the upper electrode 5 in the fixed part 1 and a projection 25 which is formed a at least one of the upper electrode 5 and the lower electrodes 27, 28 and has a clearance between it and an opposite surface. |
