发明名称 POSITIVE TYPE PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To provide a positive type photosensitive compsn. having high photosensitivity and usable under light within a wide wavelength range. CONSTITUTION:This positive type photosensitive compsn. contains a compd. (a) having at least two enol ether groups represented by the formula, a linear polymer (b) having an acid component and hydroxyl groups and a compd. (c) which is decomposed and generates an acid when irradiated with active light or radiation and the components (a) (b) are crosslinked with heat. In the formula each of R1-R3 is H, alkyl or aryl and two of them may bond to each other to form a satd. or olefinic unsatd. ring.
申请公布号 JPH06148889(A) 申请公布日期 1994.05.27
申请号 JP19920303512 申请日期 1992.11.13
申请人 FUJI PHOTO FILM CO LTD 发明人 KONDO SHUNICHI;AOTANI NORIMASA;UMEHARA AKIRA
分类号 G03F7/004;G03F7/00;G03F7/038;G03F7/039;G03F7/38;H01L21/027;(IPC1-7):G03F7/039 主分类号 G03F7/004
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