| 摘要 |
PURPOSE:To minimize the penetration of water into a body to be inspected and inspect the body to be inspected while keeping its reliability. CONSTITUTION:A body S to be inspected is supported by a subject stage 12 so that the body S partly makes contact with water W in the upper part of a water tank 11, and an ultrasonic probe 13 is arranged in water in the water tank 11. A subject stage driving part 17 is connected to the subject stage 12 through a subject stage motor 21, a vacuum pump driving part 18 is connected to the subject stage 12 through a vacuum pump 22, a probe stage driving part 19 is connected to a probe stage 15 through a probe stage motor 23, and a pulsar receiver 20 is connected to the probe 13. The subject stage 12 carries the body S to be inspected between a position A where it is partly dipped in the water and a position B where it never make contact with the water. |
