| 摘要 |
PURPOSE:To obtain a surface-modified polyester film which enables a functional ceramic film excellent in adhesion and flexing resistance to be obtained by forming thereon a thin ceramic film. CONSTITUTION:A polyester film 2 has on at least one surface thereof a polymer layer 3 contg. Si in the structural units thereof and formed by plasma polymn. Since the polymer layer 3 contains Si in the structural units thereof, it has properties close to those of a ceramic and hence is good in adhesion to a thin ceramic film to be formed in a later step. Further, since the polymer layer 3 is formed by plasma polymn., the layer 3 itself is so highly crosslinked and densified as to be excellent in mechanical strength. Furthermore, since a chemically strong bond is formed in the interface between the polymer layer 3 and the polyester film 2, the polymer layer 3 is good in adhesion to the polyester film 2. |
