| 摘要 |
PCT No. PCT/FR93/00323 Sec. 371 Date Nov. 30, 1993 Sec. 102(e) Date Nov. 30, 1993 PCT Filed Mar. 31, 1993 PCT Pub. No. WO93/20416 PCT Pub. Date Oct. 14, 1993.An optical device, of the deflectometer type, particularly with phase detection, comprises a light source, a surface to be tested, a semi-reflective surface between the light source and the surface to be tested to deflect the light beam reflected by the surface to be tested, a grating placed adjacent a focal region of the reflected light beam, and a CCD camera coupled to a data processor. Between the grating and the CCD camera there is a primary objective (19) with a large entry pupil supplying an intermediate image, a ground glass (20) adapted to receive this intermediate image, and a secondary optical system (21) through which the intermediate image passes which is formed on the ground glass (20) and which forms a final image on the a detector (6) of the CCD camera. |
