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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH06140320(A)
申请公布日期
1994.05.20
申请号
JP19920309589
申请日期
1992.10.23
申请人
YAMAHA CORP
发明人
TAWARA TAKASHI
分类号
H01L21/3213;H01L21/027;H01L21/3205;H01L23/52;(IPC1-7):H01L21/027;H01L21/320
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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