Poliervorrichtung.

摘要

A polishing apparatus comprising a tool (12) for polishing a surface of a workpiece (15), a table for supporting a workpiece (15), a piezoelectric element (20) for minutely driving the table (13), a load detector (19) for detecting the load applied from the tool (12) to the workpiece (15) supported on the table (13), and a load controller (21) for controlling the drive means in accordance with the load detected by the detector. The piezoelectric element (20) moves the table (13) minutely in the same direction as, or the direction opposite to, the direction in which said tool (12) applies a load to the workpiece (15).