PRODUCING DEVICE FOR OXIDE GLASS THIN FILM

摘要

PURPOSE:To produce a homogeneous oxide glass thin film. CONSTITUTION:Fine particles of oxide glass are uniformaly supplied and deposited on each substrate 18 by supplying the source gas, etc., to a torch 14 while rotating a turntable 20 and moving a torch 14 back and forth. Since a lower part heater 22 is relatively rotated to the turntable 20 so that the turntable 20 can be uniformly heated, and temp. of in each substrate 18 and between substrates is relatively uniformly maintained. Further, a soaking plate 24 is disposed between each substrate 18 and the turntable 20 in a contact state so that the temp. distribution in the radial direction of the turntable 20 is made more uniform for each substrate 18. Thereby, the layer of oxide glass fine particles deposited on the substrate 18 can uniformly be formed in one substrate and among substrates to certain thickness. Then each substrate 18 is heated at high temp. in another furnace to make the deposited layer of oxide glass fine particles transparent to obtain a oxide glass thin film.