| 摘要 |
<p>PURPOSE:To provide a support.transfer method which enables a plate-like material attached to an adhesive tape to be less likely to be broken and separated from the adhesive tape before and after a grooving process through which the plate-like material is slightly grooved to be divided into pieces. CONSTITUTION:A work 1 attached to an adhesive tape 3 fixed to a frame 2 provided with a hole is subjected to a shallow groove providing process and transferred keeping the adhesive tape 3 in a vacuum-sucked state, wherein the adhesive tape 3 where the work 1 is attached and the frame 2 are transferred and fixed by vacuum suction as supported by a support.transfer member 4 formed of material 5 which is higher than a prescribed value in rigidity and provided with an air-permeable part at its center.</p> |
