| 摘要 |
<p>PURPOSE:To improve throughput by a constitution wherein a wafer holder comprises a heater, a first pair of electrodes electrically connected to the heater are provided on a rotation shaft for rotating the wafer holder, and a second pair of electrodes connected to a power source are in contact with the first pair of electrodes so that they are not interfered by the rotation of the rotation shaft. CONSTITUTION:A semiconductor fabricating apparatus comprises a wafer holder 13 having a wafer mount face, a rotation shaft 21 for holding the wafer holder 13 so that the wafer mount face rotates in a plane around a circumference, and a gas scattering jig 12 provided oppositely to the wafer mount face of the wafer holder 13 and also separately from the wafer holder 13. The wafer holder 13 includes a heater, a first pair of electrodes 34 electrically connected with the heater are provided on the rotation shaft 21, and a second pair of electrodes 35 connected with a power source are provided in contact with the first pair of electrodes 34 so that rotation of the rotation shaft 21 may not be prevented. Thus wafer temperature can be stabilized and accuracy in a film forming temperature can be improved.</p> |
