PLASMA CVD METHOD,申请号JP19920272715-传众专利搜索

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发明名称	PLASMA CVD METHOD
摘要
申请公布号	JPH06122978(A)	申请公布日期	1994.05.06
申请号	JP19920272715	申请日期	1992.10.12
申请人	NISSIN ELECTRIC CO LTD	发明人	NAKAHIGASHI TAKAHIRO;KUWABARA SO
分类号	C23C16/50;C23C16/44;(IPC1-7):C23C16/44	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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