SINGLE CRYSTAL SILICON BASE PLATE,申请号JP19920272771-传众专利搜索

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发明名称	SINGLE CRYSTAL SILICON BASE PLATE
摘要
申请公布号	JPH06122593(A)	申请公布日期	1994.05.06
申请号	JP19920272771	申请日期	1992.10.12
申请人	SUMITOMO METAL IND LTD	发明人	IKEDA NAOKI
分类号	C30B15/00;C30B29/06;H01L21/322;(IPC1-7):C30B29/06	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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