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发明名称
ELECTRON BEAM EXPOSURE METHOD
摘要
申请公布号
JPH06124880(A)
申请公布日期
1994.05.06
申请号
JP19920274727
申请日期
1992.10.14
申请人
FUJITSU LTD
发明人
HIRUUMI JIYUNJI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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