发明名称 |
Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins |
摘要 |
Addition of non-nitrogen containing weak acids to amine-containing alkaline strippers for photoresists produce stripper compositions able to strip highly cross-linked or hardened photoresist films without producing any substantial metal corrosion. Weak acids useful in the stripping compositions include those having a pK in aqueous solution of 2.0 or higher and an equivalent weight of less than about 140 and are employed in an amount to neutralize from about 19% to about 75% of the amine present in the stripper composition.
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申请公布号 |
US5308745(A) |
申请公布日期 |
1994.05.03 |
申请号 |
US19920972511 |
申请日期 |
1992.11.06 |
申请人 |
J. T. BAKER INC. |
发明人 |
SCHWARTZKOPF, GEORGE |
分类号 |
G03F7/42;H01L21/027;H01L21/30;(IPC1-7):G03C5/00 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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地址 |
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