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发明名称
EQUI-MAGNIFICATION PROJECTION ALIGNER
摘要
申请公布号
JPH06120111(A)
申请公布日期
1994.04.28
申请号
JP19920266960
申请日期
1992.10.06
申请人
NEC CORP
发明人
SHIRAISHI HITOSHI
分类号
G03F7/20;G03F9/00;H01L21/027;H01L21/30;H01L21/336;H01L29/786;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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