| 摘要 |
PURPOSE:To obtain an external lead out electrode in which intrusion of moisture, causing corrosion of electrode, is blocked. CONSTITUTION:An opening having diameter, smaller than that of the bonding ball 11 of an external lead out wire to be bonded, is made in a CVD nitride film 4 covering a lower layer lead out electrode 6. A buffer metal film 7 having diameter larger than that of the bonding ball 11 is then formed covering the opening and the CVD nitride film 4 thereabout thus producing an external lead out electrode having double structure of the lower layer lead out electrode 6 and the buffer metal film 7 where the CVD nitride film 4 is sandwiched on the peripheral part except the central part. Since the exposed surface of the buffer metal film 7 is not damaged by etching, intrusion of moisture is blocked and since the creeping route of moisture between the buffer metal film 7 and the lower layer external lead out electrode connected therewith in the central part is long, moisture resistance is enhanced significantly. oboe. |
