摘要 |
A stator for a turbo-molecular pump wherein each stator disc has a frusto-conical shape for the tilted orientation of the blades (4, 4a), is divided into two semicircular parts (1, 2) having fastening tongues (12, 12a) at their inside, and is equipped along its circular outer edges (6, 6a) with projecting radial tabs (10, 10a) for fastening the stator disc between two adjacent spacer rings (18). Thanks to this characteristic the gas back streaming that may be estabished through the interstices (20) between the stator and the pump housing (13) and directed towards the suction side of the pump, can reach the inside space of the stator and thus to be pumped away. <IMAGE> |
申请人 |
VARIAN S.P.A., LEINI, TURIN/TORINO, IT |
发明人 |
CASARO, FAUSTO, I-10141 TURIN, IT;INSERRA, DARIO, I-10092 COLLEGNO/TURIN, IT;LEVI, GIAMPAOLO, I-10143 TURIN, IT;PELLIZZARI, PAOLO, I-10036 SETTIMO TORINESE, IT |