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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH06119902(A)
申请公布日期
1994.04.28
申请号
JP19910081638
申请日期
1991.03.20
申请人
ULVAC JAPAN LTD
发明人
SAKURADA YUZO;NIIKURA KOICHI;MIHARA YASUO;TSUKAGOSHI OSAMU
分类号
C23C14/48;H01J37/05;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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