| 摘要 |
PURPOSE:To quickly retrieve the image of an alignment object even when an image of the feature part of the alignment object gets out of the first observation image. CONSTITUTION:A region, which includes the feature part 2a of the image 2 of the alignment object inside an observation image 1, is registered as a first template 3, and the whole of the observation image 1 is registered as a second template 17. In case that the object can not be gotten with the pattern matching by the first template 3, the pattern matching is performed with the second template 17 being compressed at the same rate as the image of having observed a wide region at low magnification so as to modify the positional dislocation of the object gotten, and after returning the magnification back, a search by the first template is performed. |
