| 摘要 |
A coating method and apparatus which enables high-speed coating with a minimum of defects such as streaks including cases where the surface tension of the coating solution is relatively high. The method includes the following steps: applying an excess amount of a cleaning fluid to the substrate; scraping off the cleaning fluid at a first scraping section; applying an excess amount of the coating solution to the substrate while a remaining portion of the cleaning fluid remaining on the substrate is in an undried state; and scraping off a surface-side portion of the coating solution at a second scraping section, thereby metering the amount of the coating solution to be applied. In addition, a similar object is attained by a coating method wherein, in the aforementioned coating method, the organic solvent has a viscosity of not more than 10 cp, and in a case where the surface tension of the cleaning fluid is (Sigma)c (dyne/cm) and the surface tension of the coating solution is (Sigma)l (dyne/cm), the surface tension of the cleaning fluid satisfies the relation (Sigma)l-7<=(Sigma)c <=(Sigma)l.
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