| 摘要 |
<p>PURPOSE:To mount and dismantle a substrate, particularly large-sized heavy one simply to a spindle chuck while safely turning the mounted substrate in the horizontal direction regarding the spindle chuck used for a spinner, etc. CONSTITUTION:A spindle chuck is constituted including a spindle chuck body 31 composed of a table 31a, which has an inserting hole A at a central section and on which a substrate 11 is placed horizontally, a stopper 31b being brought into contact with the end face of the substrate 11 put on the table and controlling movement in the horizontal direction of the substrate 11 on the table and a tubular shaft 31c, in which one end is connected to the peripheral section of the inserting hole A from the rear side of the table and which rotates the table in the horizontal direction, and a substrate lifting piston 32, which is lifted and lowered in the vertical direction and freely projected and retreated in the vertial hole-shaped housing hole B of the tubular shaft and places the substrate 11 supported by a top face thereof onto the table when the piston 32 is brought down and retreated into the housing hole while supporting and elevating the substrate 11 put on the table by the top face thereof when the piston 32 is projected from the housing hole and lifted.</p> |
