| 摘要 |
PURPOSE:To easily form the rib height of a rib type optical waveguide with good accuracy. CONSTITUTION:An AlGaAs first clad layer 2, a GaAs guide layer 3, an AlGaAs second clad layer 4, a GaInP etching stopper layer 5 and an AlGaAs third clad layer 6 are successively laminated on a GaAs substrate 1. The third clad layer 6 and the etching stopper layer 5 are partly etched, by which the rib type optical waveguide is formed. Since the structure inserted with the etching stopper layer 5 between the clad layers 4 and 6 is adopted, the rib height is formed with good accuracy and the optical waveguide having the good characteristics is uniformly obtd. |
