| 摘要 |
PURPOSE:To obtain a method and an apparatus for evaluating a crystal of a single crystal product plate which can rapidly and highly accurately evaluate a crystal state of the single crystal product plate by using a pseudo-Kossel method. CONSTITUTION:This apparatus comprises a container 1 having an opening 2, an X-Y stage 3 provided on the opening 2, an auto-changer 7 for carrying a single crystal plate 8 to the X-Y stage 3, a thin tube X-ray bulb 9 whose center axis 18 coincides with the center of the opening 2, a scattering slit 11 attached to the thin tube X-ray bulb 9 and an imaging plate 15 orthogonal to the center axis 18. It further comprises a rotating stage 14 for continuously rotating the imaging plate 15 around the center axis 18, a reader 17 for reading an exposed face of the imaging plate 15, an X-stage 19 for parallel-moving the reader 17 along an orthogonal axis with the center axis 18, an arithmetic device 21 for performing control, etc., of respective devices, a display device 22 for displaying analysis results of the arithmetic device 21 and a distinguishing lamp 22 for initializing the imaging plate 15. |
