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经营范围
发明名称
Dummy Lichtbrechungsphotomaske.
摘要
申请公布号
DE571929(T1)
申请公布日期
1994.04.21
申请号
DE19930108370T
申请日期
1993.05.24
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, DAEJEON, KR
发明人
OH, YONG HO, JOONG-GU, DAEJEON, KR;JEON, YOUNG JIN, YUSEONG-GU, DAEJEON, KR;CHA, JAE HYOUN, SEO-GU, DAEJEON, KR;KIM, HYO JOONG, DAEJEON, KR
分类号
G03F7/20;(IPC1-7):G03F1/14
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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