| 摘要 |
<p>A workpiece is immersed in a cleaning solution (4) in a cleaning tank (2). The cleaning tank (2) has an ultrasonic vibrator (3) disposed on its bottom for radiating ultrasonic energy into the cleaning solution (4) to remove foreign matter or burrs off the workpiece. A deaerating device (5) is connected to said cleaning tank (2) for supplying a deaerated cleaning solution (4) to said cleaning tank (2). The deaerating device (5) comprises a sealed tank (6a,6b) for being supplied with the cleaning solution (4) from said cleaning tank (2). A vacuum pump or ejector (7a) is connected to the sealed tank (6a,6b) to evacuate said sealed tank (6a,6b) to release dissolved gas from the cleaning solution which is supplied to said sealed tank (6a,6b) and exposed to an evacuated space (18a,18b) in said sealed tank (6a,6b). <IMAGE></p> |
