Capacitively measuring chemical sensor system

摘要

In a miniaturizable, capacitively measuring chemical semiconductor-based sensor system consisting of a sensor and a reference element which are to be brought into contact with the electrolyte to be measured, the reference element being connected in series with the sensor, the reference element consists of a highly doped semiconductor substrate or metal/semiconductor substrate which is covered with a membrane, and the sensor consists of an insulator/semiconductor substrate which is coated with a sensitive membrane, and the sensitive membrane of the sensor is more sensitive than that of the reference element. The sensor and the reference element of this sensor system may either be applied to one and the same chip or consist of individual components which are readily interchangeable with one another.