发明名称 Laser interferometric measuring machine
摘要 The invention provides a laser interferometric measuring apparatus in which there is provided a corner-cube prism which includs a reflecting surface for selectively reflecting or transmitting a beam in accordance with the polarization condition of the beam and a transmitting surface for sending out a beam. A light source, a movable mirror, a fixed mirror, a detector and the corner-cube prism so arranged that the corner-cube prism receives a reference beam and a measuring beam from the light source through the reflecting surface, sends out the reference beam to the fixed mirror and the measuring beam to the movable mirror respectively through the transmitting surface, receives the reflected reference beam from the fixed mirror and the reflected measuring beam from the movable mirror through the transmitting surface and selectively sends out the reflected reference beam and the reflected measuring beam to the detector in accordance with their polarization condition through the reflecting surface.
申请公布号 US5305088(A) 申请公布日期 1994.04.19
申请号 US19930073292 申请日期 1993.06.07
申请人 KONICA CORPORATION 发明人 HOSOE, SHIGERU
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
代理机构 代理人
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