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发明名称
SURFACE TREATING DEVICE
摘要
申请公布号
JPH06108270(A)
申请公布日期
1994.04.19
申请号
JP19920261879
申请日期
1992.09.30
申请人
MITSUI HIGH TEC INC
发明人
FUJITA KATSUFUSA;KOBAYASHI KATSUICHIRO
分类号
C23C18/16;C23F1/08;H01L21/306;H01L23/50;(IPC1-7):C23F1/08
主分类号
C23C18/16
代理机构
代理人
主权项
地址
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