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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06104244(A)
申请公布日期
1994.04.15
申请号
JP19920250162
申请日期
1992.09.18
申请人
NIPPONDENSO CO LTD
发明人
FUKADA TAKESHI
分类号
H01L21/3063;H01L21/306;H01L29/84;(IPC1-7):H01L21/306
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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