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发明名称
THIN FILM THERMOCOUPLE ELEMENT AND MANUFACTURE THEREOF
摘要
申请公布号
JPH06104494(A)
申请公布日期
1994.04.15
申请号
JP19920250228
申请日期
1992.09.18
申请人
FUJITSU LTD
发明人
KUROKAWA JUNKO
分类号
G01K7/02;H01L35/32;H01L35/34;(IPC1-7):H01L35/32
主分类号
G01K7/02
代理机构
代理人
主权项
地址
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