发明名称 PROCESS FOR DEPOSITING SUPERCONDUCTING OXIDE CERAMIC COATINGS ON A SUBSTRATE.
摘要 <p>The process disclosed permits at least one coating of a superconducting oxide ceramic material of the material system having a high transition temperature to be deposited on a substrate. It is difficult to produce continuous coatings in the form of strip material using known physical deposition processes of this type. The process according to the invention therefore consists of the following steps: a) the starting materials comprises at least one vaporizable compound for each metallic component; b) each of the said compounds is vaporized at a predetermined temperature (T1 to T3) and a predetermined partial pressure and dosed by means of a carrier gas stream (3a to 3c) to yield a vapour mixture (5) of predetermined mixing proportions; c) in order to deposit the superconducting material, the reaction conditions for a reaction between or with the vaporized compounds are adjusted by supplying energy.</p>
申请公布号 EP0391901(B1) 申请公布日期 1994.04.13
申请号 EP19880907278 申请日期 1988.08.24
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 MUELLER, ALFRED
分类号 B32B18/00;C01G3/00;C04B35/45;C23C16/40;C23C16/448;H01L39/24;(IPC1-7):H01L39/24;C23C16/00;C04B35/00 主分类号 B32B18/00
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