| 摘要 |
PURPOSE:To produce ultrapure water minimized in organic substance, live bacteria and dissolved oxygen by dissolving ozone in untreated water, irradiating the untreated water with ultraviolet rays, passing the treated water through the liquid contact side of a specified gas permeation membrane, supplying hydrogen to the gas contact side, furthermore passing water through a specified ion exchange resin and performing ultrafiltration. CONSTITUTION:In a purification method for obtaining ultrapure water, ozone is dissolved in pure water supplied from a pure water feed line 1 in an ozone dissolving tower 3. The treated water is irradiated with ultraviolet rays in an ultraviolet irradiation tower 11. The water is passed through the liquid contact side of a gas permeation membrane 13 supporting palladium. Hydrogen is supplied from a feed line 16 of gaseous hydrogen to a gas contact side. The treated water is passed through an ion exchange resin layer wherein OH-type anion exchange resin is mixed with H-type strongly acidic cation exchange resin. Thus ultrafiltration treatment is performed for the treated water in an ultrafilter 19. |
