发明名称 Electrostatic positioner
摘要 An electrostatic positioner with one or more first electrodes for producing forces to confine a charged specimen in the direction perpendicular to a center axis and second electrodes for producing forces to confine the charged specimen in the direction of the center axis.
申请公布号 US5303117(A) 申请公布日期 1994.04.12
申请号 US19930074283 申请日期 1993.06.09
申请人 ISHIKAWAJIMA-HARIMA JUKOGYO KABUSHIKI KAISHA 发明人 OGIHARA, MASAAKI;AOYAMA, MICHIO;FUJII, TSUMORU;IKEGAMI, YUJI;SHINOHARA, JOJI
分类号 H02N13/00;(IPC1-7):H02N13/00 主分类号 H02N13/00
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