Smooth epitaxial compound films having a uniform thickness by vapor depositing on the (100) crystallographic plane of the substrate,申请号US19620209776-传众专利搜索

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发明名称	Smooth epitaxial compound films having a uniform thickness by vapor depositing on the (100) crystallographic plane of the substrate
摘要
申请公布号	US3146137(A)	申请公布日期	1964.08.25
申请号	US19620209776	申请日期	1962.07.13
申请人	MONSANTO COMPANY	发明人	WILLIAMS FORREST V.
分类号	H01L21/00;H01L21/205;H01L29/04	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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