| 摘要 |
<p>PURPOSE: To provide an electric field releasing device which minimizes the problems of lack of sensitivity, stability and uniformity with respect to damages by a method, wherein a part or all of electrodes of devices are formed outside monocrystals with no grain boundaries, and its manufacturing method. CONSTITUTION: An electric field releasing device 100 uses monocrystal to exclude all or a part of grain boundaries of electrodes 103, 104, 205. By excluding the grain boundaries, sensitivity with respect to damages is reduced, stability of the device 100 is enhanced, and uniformity and reproducibility between the devices 100 are enhanced. In another preferred embodiment, an emitter electrode 103 and a gate electrode 104 are formed from a monocrystal thin film. In another embodiment, another structure is utilized in which one or more of electrodes 103, 104, 205 are formed of monocrystals.</p> |
