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发明名称
FILM FORMING METHOD AND ITS EQUIPMENT
摘要
申请公布号
JPH0697061(A)
申请公布日期
1994.04.08
申请号
JP19920248019
申请日期
1992.09.17
申请人
FUJITSU LTD
发明人
MATSUDA HIDEYUKI;IIZUKA KATSUHIKO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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