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发明名称
Plurality of thin film field-effect transistors and method of manufacturing the same.
摘要
申请公布号
EP0354372(B1)
申请公布日期
1994.04.06
申请号
EP19890112789
申请日期
1989.07.12
申请人
AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人
HAYASHI, YUTAKA ELECTROTECH. LAB. AGENCY OF;YAMANAKA, MITSUYUKI ELECTROTECH. LAB. AGENCY OF;YOSHIMI, TAKASHI
分类号
H01L27/088;H01L21/336;H01L21/337;H01L21/338;H01L21/8234;H01L21/84;H01L29/43;H01L29/78;H01L29/786;H01L29/808;H01L29/812;(IPC1-7):H01L27/12;H01L29/784
主分类号
H01L27/088
代理机构
代理人
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