| 摘要 |
PURPOSE:To prepare pure water with low dissolved oxygen concentration and organic carbon concentration. CONSTITUTION:A degassing apparatus 1, an oxidizing apparatus 2, an ion removing apparatus 3, and a fine particle removing apparatus 4 are successively installed from the upper stream side in a flow route 8 in which the water to be treated runs, and the apparatus 1 is a dissolved oxygen-removing apparatus having a power varying system, the apparatus 2 is to oxidize organic carbon by radiating ultraviolet rays, and the apparatus 3 is to remove organic carbon ions produced by the oxidation. Further, the total organic carbon concentration measuring apparatus 5, a dissolved oxygen concentration measuring apparatus 6, and a data processing apparatus 7 are installed. Before the water to be treated is irradiated with ultraviolet rays in the organic carbon removing apparatuses (the oxidizing apparatus 2 and ion removing apparatus 3), the concentration of the dissolved oxygen in the water is controlled to the level corresponding to the organic carbon concentration by the degassing apparatus. Consequently, oxidization species of the organic carbon are surely retained and the impurity concentration is thus lowered. |
