发明名称 |
Process for the production of relief patterns and images utilizing an organic compound having at least one acid-cleavable group and a storage stability improving amount of a second organic compound |
摘要 |
A radiation-sensitive mixture suitable for producing relief patterns comprises (a) a water-insoluble but alkali-soluble polymeric binder, (b) an organic compound whose solubility in an alkaline developer is increased by the action of acid and which contains at least one acid-cleavable group and additionally a group which forms a strong acid on irradiation, and additionally (c) an organic compound which reacts with water or stronger nucleophiles at up to 120 degrees C.
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申请公布号 |
US5300400(A) |
申请公布日期 |
1994.04.05 |
申请号 |
US19930091089 |
申请日期 |
1993.07.14 |
申请人 |
BASF AKTIENGESELLSCHAFT |
发明人 |
SCHWALM, REINHOLD;BINDER, HORST |
分类号 |
G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/30 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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