发明名称 Process for the production of relief patterns and images utilizing an organic compound having at least one acid-cleavable group and a storage stability improving amount of a second organic compound
摘要 A radiation-sensitive mixture suitable for producing relief patterns comprises (a) a water-insoluble but alkali-soluble polymeric binder, (b) an organic compound whose solubility in an alkaline developer is increased by the action of acid and which contains at least one acid-cleavable group and additionally a group which forms a strong acid on irradiation, and additionally (c) an organic compound which reacts with water or stronger nucleophiles at up to 120 degrees C.
申请公布号 US5300400(A) 申请公布日期 1994.04.05
申请号 US19930091089 申请日期 1993.07.14
申请人 BASF AKTIENGESELLSCHAFT 发明人 SCHWALM, REINHOLD;BINDER, HORST
分类号 G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/30 主分类号 G03F7/004
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