Verfahren und Vorrichtung zur Durchführung einer vorbestimmten Oberflächenbehandlung,申请号DE19914128749-传众专利搜索

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发明名称	Verfahren und Vorrichtung zur Durchführung einer vorbestimmten Oberflächenbehandlung
摘要
申请公布号	DE4128749(C2)	申请公布日期	1994.03.31
申请号	DE19914128749	申请日期	1991.08.29
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP	发明人	MATSUDA, TETSUO, KAWASAKI, JP;MITAKA, YUUICHI, KAWASAKI, JP;YONEKURA, AKIMICHI, YOKOHAMA, JP
分类号	H01L21/205;C23C16/44;C23C16/455;C30B25/14;H01L21/30;H01L21/31;H01L21/316;(IPC1-7):C23C16/44	主分类号	H01L21/205
代理机构		代理人
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