DRYING METHOD AND APPARATUS THEREFOR.

摘要

A method of drying electronic parts such as semi-conductors, liquid crystal display elements and printed wiring boards, optical parts such as lenses and prisms, and precision machine parts such as gears and lead frames by removing water from their surfaces after cleaning and surface treatments. A material (A) to he dried is introduced into a container (1), and the air in the container (1) is replaced with hot stream to heat the material (A). Then, the supply of hot steam is stopped, and the space in the container (1) is cooled under the condition where the container (1) is shut off from the open air. Finally, a dry gas is introduced into the container (1). An apparatus for this purpose comprises a cooling unit (8) for cooling the space in the container (1) for the material (A), a condensate discharge pipe (14) and a dry gas introduction pipe (7). The cooling unit (8) and the material (A) are thermally insulated by a support (11) for holding the material.