,申请号JP19860113524-传众专利搜索

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发明名称
摘要
申请公布号	JPH0624188(B2)	申请公布日期	1994.03.30
申请号	JP19860113524	申请日期	1986.05.20
申请人	HITACHI LTD	发明人	FUKUDA TAKUYA;MISAWA YUTAKA;NAMETAKE SEIGO
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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