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经营范围
发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH0689863(A)
申请公布日期
1994.03.29
申请号
JP19920240545
申请日期
1992.09.09
申请人
MATSUSHITA ELECTRON CORP
发明人
YANO TAKASHI
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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