| 摘要 |
<p>PURPOSE:To incorporate an angle monitor device capable of precisely adjusting a relative rotation angle between optical elements for spectral diffraction in an X-ray spectroscope capable of obtaining an X-ray having a desired single wavelength by means of a pair of the optical elements for the spectral diffraction. CONSTITUTION:A first reflection member 13a for reflecting a beam 4 emitted from a light source 3 is attached to an optical element for spectral diffraction 2a, a second reflection member 13b for reflecting again the reflection light of the first reflection member 13a is mounted to another optical element for the spectral diffraction 2b and a third reflection member 13c on which the reflection light of the second reflection member 13b is vertically made incident is fixed on a frame. After the beam 4 is reflected on the third reflection member 13c, a light position I of a return beam 4a transmitted by way of the first and the second reflection members 13a, 13b is detected with a light receiving device 8, and tin a control part 14 a relative rotation angle ¦theta1-theta¦ is evaluated at the light position I 4 detected with the light receiving device 8.</p> |
