| 摘要 |
<p>PURPOSE:To make it possible to operate in synchronization with a push-up mechanism independently from a distortion or vibration by providing a base portion carried by carrying means a suction portion for holding semiconductor parts movably attached to the base portion and detecting means for detecting the movement of the suction portion relative to the base portion. CONSTITUTION:This equipment has a chip conveying arm 76 as a base portion to be held and conveyed by carrying means and a suction portion 77 attached to its tip portion in a freely up-and-down movable manner within a certain limit for holding an IC chip. A suction collet 77b is set to a mounting base 77a of this suction portion 77 and a supporting block 79 is set at its upper end portion. This supporting block 79 comes into contact with the upper surface of the tip portion of a chip carrying arm 76 and, in this way, the mounting base 77a is supported in a suspended state. Near the tip portion of the chip conveying arm 76, the movement of the suction portion 77 is detected by a magnetic proximity sensor 92 and a metal piece 93. Thus, the suction portion 77 can be operated in completely synchronization with the push-up member.</p> |
