| 摘要 |
1,118,631. Crystal-pulling gallium arsenide. WACKER-CHEMIE G.m.b.H. 5 July, 1965 [3 July, 1964], No. 28300/65. Heading BIS. A crystal of gallium arsenide 13 is pulled from a crucible 14 in a vessel 8 heated by a resistance coil 15 and containing arsenic vapour from a source 16. A slow current of inert gas is passed under pressure from an inlet 4, through the narrow annular space between a neck 7 and a pulling rod 5, the narrow annular space between the pulling rod and a sleeve 9, a capillary tube 11, and an outlet tube 12. Arsenic entrained in the inert gas is condensed out in the outlet tube 12. The pressure difference may be 0.1-3 mm of Hg, corresponding to a flow of 0.002-0.02 1/hr. The inert gas may be hydrogen (to remove an oxide film), nitrogen or a noble gas. |
