| 摘要 |
<p>PURPOSE:To provide a manufacturing method of laminated piezoelectric element capable of cutting down the manufacturing cost thereof not requiring of so strict green sheet control. CONSTITUTION:Green sheets are baked to form ceramic sheets. Next, the ceramic sheets are polished to form an electrode on one main surface of the ceramic sheets. Furthermore, a glass layer is formed on one main surface of the ceramic sheets to bond multiple ceramic sheets for the formation of a laminated body. Next, the multiple ceramic sheets are polarization-processed. Besides, during the formation step of the laminated body, it is recommended that the multiple ceramic sheets are to be pressure-fixed by applying a load. On the other hand, the thickness of the glass layer not exceeding 1mum is preferable.</p> |
