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发明名称
VERFAHREN ZUR POSITIONSBESTIMMUNG VON OBJEKTMARKEN ZUR KALIBRIERUNG DER ABLENKUNG IN ELEKTRONENSTRAHLGERAETEN
摘要
申请公布号
DD248222(B5)
申请公布日期
1994.03.17
申请号
DD19860289187
申请日期
1986.04.16
申请人
JENOPTIK GMBH,DE
发明人
BACH,BERNHARD,DIPL.-PHYS.,DE;PLONTKE,RAINER,DR.RER.NAT.,DE;BERGMANN,ECKHART,DIPL.-MATH.,DE
分类号
H01J37/304;(IPC1-7):H01J37/304
主分类号
H01J37/304
代理机构
代理人
主权项
地址
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