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发明名称
Herstellungsverfahren einer Halbleiteranordnung.
摘要
申请公布号
DE69006434(D1)
申请公布日期
1994.03.17
申请号
DE19906006434
申请日期
1990.08.28
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
SHINDO, HITOSHI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号
H01L29/78;H01L21/225;H01L21/268;H01L21/336;H01L29/786;(IPC1-7):H01L31/113;H01L31/18
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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